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Conferences > CLEO > 1983 > THL > THL1

Grating coupled detectors

Alexander M. Glass, P. F. Liao, A. M. Johnson, L. M. Humphrey, D. H. Olson, M. B. Stern, and R. A. Lemons

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Abstract

The reduction of physical dimensions of highspeed detectors to overcome transit time limitations is frequently accompanied by reduced optical coupling into the detector and hence reduced quantum efficiency. We have greatly improved the quantum efficiency of both metal-oxide-metal (MOM) tunnel detectors and ultrathin metal-α-Si:H-metal (MIM) detectors by structuring the devices with a periodic array of bumps, which efficiently couples the inci- deni light to surface waves in the detector.

© 1983 Optical Society of America

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