Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

High-efficiency Fresnel zone plate for microoptics by deep UV lithography

Not Accessible

Your library or personal account may give you access

Abstract

Fresnel zone plates are promising components for microoptic circuitry because of their versatility for various requirements such as fine focusing, image conversion, beam splitting with focusing function, and array structures. However, achievement of high diffraction efficiency was only possible when blazed or volume-holographic structure was employed, either of which caused technical complexities.

© 1985 Optical Society of America

PDF Article
More Like This
Characterization of Zone Plates for lithography and Imaging

Rajesh Menon, Darío Gil, D. J. D. Carter, Xudong Tang, and Henry I. Smith
DWA3 Diffractive Optics and Micro-Optics (DOMO) 2002

Supplementary Zones-surrounded Fresnel Zone Plate

Yen-Min Lee, Szu-Hung Chen, Chen-Pin Hsu, Pei-Chuen Chiou, Kuen-Yu Tsai, Tien-Tung Chung, Cheng-Han-Tsai, Zhan-Yu Liu, and Jia-Han Li
20p_C4_6 JSAP-OSA Joint Symposia (JSAP) 2014

Solid immersion Fresnel zone plate

Yaoju Zhang, Xiao Qian, Xiukai Ruan, and Haiyong Zhu
DW2A.15 Digital Holography and Three-Dimensional Imaging (DH) 2015

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.