Abstract

Many studies of high-rep-rate discharge-pumped excimer lasers have been intensively carried out for industrial applications such as microelectronics processing and photochemical reactions, in the course of developing high-rep-rate excimer lasers, techniques improving laser gas degradation have been established, but the lifetime of optics and the exciter circuit needs further work. We have developed an all-solid-state laser modulator to improve the lifetime of the exciter.

© 1985 Optical Society of America