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Conferences > CLEO > 1986 > TUK > TUK10

Reactive Ar-ion laser-assisted etching of molybdenum and tungsten foils in air

Gad Koren

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Abstract

Recently a preliminary study of laser-assisted chemical etching of Mo foils in air was reported,1 In the present study, a systematic investigation of this process in Mo as well as in W was carried out. An Ar-ion laser beam was tightly focused on the samples which absorbed ~55% of the incoming radiation. This heated them locally to red hot temperatures, where rapid oxidation and volatilization of the trioxides (MoO3 and WO3) caused the etching.

© 1986 Optical Society of America

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