Abstract
In contrast to KrF* the published results on e- beam-pumped ArF* are modest. The physics and performance studies are not less exciting than what has been obtained so far with KrF*. We found that ArF* has also the potential for high specific output power (>40 J/liter) and efficiency at high pressure.
© 1986 Optical Society of America
PDF ArticleMore Like This
Hiroshi Kumagai, Akira Suda, and Minoru Obara
TUN2 Conference on Lasers and Electro-Optics (CLEO:S&I) 1986
Akira Suda, Minoru Obara, and Tomoo Fujioka
THG3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1984
HIROSHI KUMAGAI, YOUNG-WOO LEE, SHU-ICHI ASHIDATE, and MINORU OBARA
TUB2 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988