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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper THM14

Simulation model and exposure phenomena of coherent absorption in HRP lithography

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Abstract

The mechanisms responsible for latent image formation in lithographic high-resolution plates of Ag salts were studied using laboratory experiments with coherent laser absorption. An exposure model for optical density evaluation was derived for feature-dependent analysis. The results of statistical Gaussian spot sensibilization show a quadratic dependence with the impinging intensity before the initiation of the saturation process.

© 1988 Optical Society of America

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