Abstract
Laser projection patterned techniques offer great flexibility in microelectronics uses. Thin-film deposition has been demonstrated as selective deposition of aluminum.1 Laser chemical doping using gas phase dopant molecules has not involved spatial selectivity on microscale.2
© 1988 Optical Society of America
PDF ArticleMore Like This
Y. S. LIU, W. T. GRUBB, and H. S. COLE
WX5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988
JAMES H. BRANNON
WX1 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988
Qin Qi-zong, Li Yu-lin, Zhang Zhuang-jian, Jin Zhong-kao, and Zheng Qi-ke
TuC7 International Quantum Electronics Conference (IQEC) 1988