Abstract

The need for noninvasive testing of integrated circuits and devices is rapidly becoming more apparent. The increasing speed and complexity of current and future circuitry have already exceeded the capabilities of conventional all-electronic testing techniques. In recent years, picosecond laser systems have been applied to a variety of optically based measurement schemes for making electrical waveform measurements¹ at internal circuit nodes. However, some techniques are restricted by only being applicable to a particular material system or the necessity of operation in vacuum.

© 1988 Optical Society of America