Abstract

Recently, many solid-state lasers have been widely employed in Japanese industries, especially in the electronics industries for precise and reliable processing. To expand the use of solid- state lasers and to achieve higher processing speed, we are developing slab lasers of high power, high repetition rate, and high beam quality. Metal processing systems with optical fibers for large and complex 3-D work, multiwork station systems linked to only one laser with optical fibers, and compact x-ray sources for lithography are promising areas for such lasers.

© 1988 Optical Society of America