Abstract
Historically, understanding electron-beam- pumped XeCI laser kinetics has tended to lag behind that of the other major excimer lasers, XeF and KrF,1 This understanding has been complicated by controversies regarding issues such as the amount of vibrationally excited HCI that is generated,2 which is important for effective electron attachment. To refine our understanding of XeCI lasers, we performed experiments at Spectra Technology to measure the fundamental kinetic parameters of time-dependent electron density,3 time-dependent xenon-excited-state density,4 and burnup of HCI.5 These new comprehensive data, together with improvements to and comparisons with a computer model of XeCl, are presented here.
© 1988 Optical Society of America
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