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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper WX5

Surface modification for selective metallization using excimer lasers

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Abstract

Many thin-film deposition processes take place as a result of surface nucleation and catalytic reactions. Selective modification of surface reactivities with lasers, using either the direct writing or projection method, is intrinsically a sensitive method to prepare a surface for high-resolution patterning or selective thin-film deposition without the photoresist.

© 1988 Optical Society of America

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