Abstract
Recently, a dry-etching process for the fabrication of monolithic broad area lasers has been demonstrated to achieve facets with a quality similar to cleaved ones.1 With this process as the basis, a fully monolithic self-aligned ridge laser process has been developed for AlGaAs/GaAs graded index separate confinement heterostructure single quantum well (GRINSCH-SQW) structures.
© 1990 Optical Society of America
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