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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CTHB3

Laser power saturation in ultrahigh repetition rate operation of a XeCl excimer laser

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Abstract

Excimer lasers are used widely in various areas such as microlithography, photo-chemical reactions, fine machining of materials, and medical treatment. Although for such uses it is necessary to increase the repetition rate, there have so far been few reports on excimer laser operation over 2 kHz.

© 1990 Optical Society of America

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