Abstract

The ultimate spatial resolution of any optical system depends on the wavelength used and its geometry. If a nonlinear process is used to create an image, the ultimate image resolution depends also on the interaction of the light with the material that carries the image, and the image resolution may be larger or smaller than determined by optical resolution. It is the objective of this work to determine the spatial resolution possible with ultraviolet laser ablation.

© 1991 Optical Society of America