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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper CThA1

High-repetition-rate operation of a KrF excimer laser with a semiconductor pulse switch

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Abstract

Long-life operation is required for industrial excimer lasers. It is necessary to decrease the input peak power to the laser to get long-life operation of the switching device, optical components, and discharge electrodes. Accordingly, the repetition rate of pulse excitation has to be increased corresponding to the required laser power.

© 1991 Optical Society of America

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