Abstract
Efficient wavelength conversion of the high average power of a copper laser can provide a new source of ultraviolet (UV) for applications such as microlithography. Frequency-doubling of copper lasers using BBO has been demonstrated by several groups.1-3 Although BBO has several attractive features—high damage threshold, low absorption, and relatively large nonlinear coefficient—its small acceptance angle limits the doubling efficiency because of the large divergence of the copper laser. Here, we report frequency-doubling of an injection-seeded copper laser. By injection seeding, divergence of only a few times the diffraction limit can be obtained for the entire pulse duration at powers >30 W (total power). We have used this laser to achieve a conversion efficiency of 18%.
© 1991 Optical Society of America
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