Abstract
Pulsed laser deposition has been widely used recently for the thin film deposition of multielemental metal oxides. In addition, the method enables the fabrication of desired material structures such as superlattices and multilayer devices consisting of different materials in a rather simple way.1,2 We briefly summarise, as an example, the fabrication of high Tt YBa2Cu3O2-based superconducting superlattices by pulsed laser deposition with intervening layers ranging from dielectric, semiconducting to metallic materials such as SrTiO3 and Pr1- xYxBa2Cu3O7 (O<x<1).
© 1992 Optical Society of America
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