Abstract

With materials processing uses demanding more satisfactory uniformity of laser output and larger beam areas with increasingly higher energies, preionization by x-ray illumination becomes a necessity. When compared with all UV sources, the superior intensity, uniformity, and volumetric penetration capabilities of x-rays is preferred for emerging high energy industrial excimer laser applications where pulse-to-pulse energy stability (±1%) is critical. In addition, the inherently particulate-free operation of external-cavity x-ray preionizers contributes greatly toward increased rare gas halide lifetime, and the important service, repair, and overhaul intervals in manufacturing environments.

© 1992 Optical Society of America

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