Abstract

Wider acceptance for excimer lasers within medicine and industry require continuing improvements to laser reliability. Gas lifetime is an important reliability issue because it has an impact on the costs associated with maim taining a system. Impurities, present within the gases that fuel excimer lasers, have always been implicated as primary contributors to shortening the time intervals between optics cleanings and gas refills.^1-3

© 1993 Optical Society of America