Abstract

Soft x-rays of 1 nm wavelength are a strong contender for the production of 256 Mbit and 1 Gbit DRAM microchips. Compact syncrotrons, generating tens of watts of x-rays per beam into ten beams or more, will constitute the main source for large-scale production of such microchips. Nevertheless, such machines require a relatively large initial investment and occupy extensive factory space. Therefore, smaller, laboratory-size, x-ray sources will be required to generate the power of only one synchrotron beam to be used either by large companies for R&D work or by small companies that cannot afford a synchrotron and have a limited production.

© 1993 Optical Society of America