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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1993),
  • paper CTuJ5

Light-assisted processing of porous silicon

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Abstract

Since the discovery1 that porous silicon can emit visible light with photoluminescence (PL) quantum efficiency of between 1 and 10%, many groups have investigated light-emitting porous silicon. (LEpSi). In the present work, we show how the physical and light emission properties of porous silicon can be controlled by in-situ illumination during electrochemical anodization and etching, and by ex-situ illumination during dry or wet processing.

© 1993 Optical Society of America

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