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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1993),
  • paper CTuN10

Double-layer anti reflection coatings for semiconductor lasers by using in situ ellipsometric monitoring

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Abstract

The performance of laser amplifiers and broadly tunable external cavity lasers is critically dependent on the ability to deposit ultra-low reflectivity coatings on the laser facets. A double-layer AR coating has several advantages over a single-layer design including a wider tolerance on the coating parameters and a wider low reflectivity bandwidth. By using a combination of two stoichiometric materials, a double-layer coating is expected to be more stable as compared to a sirgle- layer coating, which uses a non-stoichiometric composition.1,2

© 1993 Optical Society of America

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