Abstract
Photonic integrated circuits (PICs) require lateral propagation of light through waveguides connecting opto-electronic devices. Unfortunately, those materials whose properties and heterostructures form the best semiconductor lasers ate not generally those that are best suited to the formation of low- loss waveguides. The formation of active waveguides (i,e., waveguides exhibiting gain) in a suitable dielectric material would permit on-wafer incorporation of amplifiers, modulators, switches, directional couplers, and solid-state lasers. However, deposition and subsequent processing of this dielectric material must proceed at relatively low temperatures (<450 C) to avoid degradation of the complex III-V device structures of current semiconductor lasers. Polysiloxane spin-on glasses (SOGs) provide a promising matrix tor incorporation of rare-earth ions such as Nd3+ and Er3+, to produce active waveguides
© 1993 Optical Society of America
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