Abstract

A compact (table-top), focused Alexandrite (750 nm) pulsed-laser system generated soft x-ray emission from planar-metal targets. Quantitative x-ray spectroscopy (active and passive detection) and pinhole imagery were used to characterize tire 10 - 14 Å region that is important for resisting exposure in proximity x-ray lithography. X-ray data were collected from transition metal targets. The spectra, acquired on film, were densitometered and computer processed to obtain line intensities from the L-shell transitions in highly-ionized copper and iron plasma. Spectral data were also acquired from aluminum in order to determine plasma parameters such as temperature and density.

© 1993 Optical Society of America