Abstract

The ability to enhance and control the tonic content of excimer laser-ablated plumes is critical to the in-situ crystalline thin film growth of semiconductors, superconductors, optical materials, and heterostructures.^1,2 The use of activated deposition in an oxygen ambient has been shown to be instrumental in the in-situ deposition of superconducting Y₁Ba₂Cu₃O_7-x (YBCO) films at lower substrate temperatures than was previously possible.³

© 1993 Optical Society of America