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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1993),
  • paper CWJ20

Time-resolved density measurements of excited components in an ArF excimer laser

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Abstract

In recent years several spectroscopic investigations have been made on discharge plasma in rare-gas halide excimer lasers to understand the formation dynamics of excited components (atoms, ions, and molecular complexes), and basic plasmo-chemical reactions.1,2

© 1993 Optical Society of America

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