Abstract

The molecular F₂* laser is a powerful laser source in the vacuum ultraviolet. Therefore, it is interesting in applications such as high-resolution. lithography, photochemical vapor deposition, and efficient x-ray production. Recently, high-output energy has been reported in discharge pumped systems.¹ However, numbers on important parameters such as the gain and saturation intensity of the laser medium are only partly available.^2,3

© 1993 Optical Society of America