Abstract

Fabrication of surface-relief submicron gratings on semiconductor, quartz, and polymer materials is of interest in numerous applications such as distributed feedback lasers, wavelength division de-multi-plexers, holographic optical elements, surface acoustic wave directional-couplers, and physical and chemical sensors. Excimer lasers offer several advantages in patterning such gratings, their high fluence making possible single-step processing for high through-put and their short wavelength offering submicron line spacing.

© 1994 Optical Society of America