Abstract

In order to clarify the behavior of the ablated particles in a pulsed-laser deposition process of high-temperature superconducting (high-Tc) thin films, a variety of diagnostic techniques have been applied. However, the most of them are concerned with the interaction of ablated particles with ambient oxygen gas.^1,2 The interaction between the substrate on which the film is deposited and the ejected particles has been merely studied, in spite of its importance. In this paper, the interaction of the ablated particles with the substrate is investigated, on the basis of the one-dimensional laser- induced fluorescence (1D LIF) observation of the spatial distributions of the ablated particles (YO) near the substrate surface. The measurements were performed in-situ during high-Tc film deposition.

© 1994 Optical Society of America