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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CThM4

Frequency conversion of a diode-pumped Q-switched Nd:YAG laser operating in a single transverse mode

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Abstract

Laser application in micromachining requires UV-laser sources with high beam quality, stable in output power and pointing stability. Especially in the semiconductor industry, material processing systems are required, which operate in the sub-micron range. The laser sources used most frequently at present are exdmer lasers. But the industrial application of these lasers is restricted because of their poor beam quality and low repetition rate. Frequency converted cw-pumped solid-state lasers offer the advantage of nearly diffraction limited radiation which results in excellent focusing behaviour at high repetition rates. But strong thermal effects inside the laser rod limit the reliability with respect to power fluctuations and pointing stabilities. Recently, it was shown that diode-pumping is superior, and may overcome these problems. However, difficulties concerning efficient frequency conversion arise, which are due to limited angular acceptance widths, walk-off angles and thermal effects in the nonlinear materials.

© 1994 Optical Society of America

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