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Conferences > CLEO > 1994 > CTuR > CTuR4
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CTuR4

Precise, low-cost tracking refractometers for industrial applications

M. L. Eckboff and J. L. Hall

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Abstract

Displacement interferometry in the air provides a convenient method for the control of industrial processes, notably precision diamond-turning and the step-and-repeat process of photolithography for IC production. However, the refractive index variability of the air limits the accuracy of such interferometers and it is usually necessary to correct the displacement-measuring interferometer for such variations. One approach is to employ a miniature weather bureau to separately track the pressure, temperature and relative humidity, making use of Edlen’s phenomenological formula to calculate the refractive index.

© 1994 Optical Society of America

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