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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CWH11

Deposition of fluoropolymer thin films by vacuum-ultraviolet laser ablation

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Abstract

The production of wide variety of films by the process of laser ablation of solid materials has been actively studied. Particularly, excimer laser ablation has been shown capable of producing high-temperature ceramic superconducting films, and epitaxial films of ferroelectric ceramics with well defined material compositions.

© 1994 Optical Society of America

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