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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CFA3

Fabrication of strongly confined-waveguides with simultaneous domain inversion by high-temperature, rapid thermal annealing of proton-exchanged LiTaO3

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Abstract

Quasi-phase-matching (QPM) waveguides fabricated by annealed proton exchange (APE) in LiTaO3 have been demonstrated to be promising candidates as frequency-converting elements in blue-emitting solid-state compact devices that use diode lasers as fundamental sources.1 However it usually takes two photolithography processes to fabricate these Waveguides: The first is for the fabrication of the domain-inverted structure, which requires high-temperature annealing and the second is for fabrication of the uniform channel waveguide fabrication which is accomplished by annealing at a lower temperature.1 It is of interest to investigate whether a single annealing of proton-exchanged LiTaO3 will form the periodically-domain-inverted grating and will simultaneously form the waveguide.

© 1995 Optical Society of America

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