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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CFN7

Highly sensitive laser profile analysis of solid samples

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Abstract

Three variants of combined techniques for determination of profile elements' concentrations both on the surface and in the volume of solid samples (dielectrics, semiconductors, metals and alloys) without any sampling were realized.

© 1995 Optical Society of America

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