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Conferences > CLEO > 1995 > CThD > CThD2
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CThD2

1-kHz repetition-rate operation for a compact ArF excimer laser

H. Sekita and S. Ito

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Abstract

High-repetition-rate operation for excimer lasers is useful in industry for, e.g., semiconductor processes. KrF, XeF, and XeCl excimer lasers have been operated at repetition rates over 1 kHz with a large gas-flow system to sweep the heated gas out of the discharge region immediately. High-repetition rate operation for an ArF excimer laser is especially difficult because of this laser’s unstable discharge and small gain.

© 1995 Optical Society of America

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