Abstract
Solid state lasers for XUV generation or micro-material processing should be as brilliant as possible. The laser brightness depends quadratically on the beam quality whereas the power has only a linear influence. To increase the beam quality we used phase conjugating SBS mirrors in oscillators1 or master-oscillator double-pass amplifiers (MOPAs). MOPAs have been described with output powers of more than 100 W.2,3 To decrease the complexity of such systems we developed a double-pass MOPA with a simple Nd:YALO single-rod amplifier. Meanwhile, the TEM00 oscillator power has been increased by using a new type of passive Q-switch and optimized resonator design.
© 1995 Optical Society of America
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