Abstract
We are pursuing improved vacuum ultraviolet (VUV) conversion efficiency by taking advantage of two-photon resonances within the tuning range of the ArF excimer laser. The E, F-X transitions in H2 are perhaps the most heavily studied, but two-photon resonances in Kr and HD can also be reached with ArF.1 Difference-frequency mixing ArF and dye lasers can theoretically produce continuously tunable VUV from 110 to 180 nm with relatively high powers. We are pursuing this technique to generate tunable radiation in the region of Lyman-α at 121.6 nm.
© 1996 Optical Society of America
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