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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1996),
  • paper CThO1

High-resolution electro-optic measurements of 2-D field distributions inside MMIC devices

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Abstract

Frequency-domain electro-optic probing of potential and electric field distributions in MMICs have successfully been, used for a function and failure test as well as for a quantitative circuit-internal characterization.1,2 To demonstrate the capabilities of the measurement technique especially for a device-internal analysis, in this paper the 2-D electro-optic field mapping is applied to study coplanar MMIC components with structure sizes in the μm and sub-μm range.

© 1996 Optical Society of America

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