Abstract
Frequency-domain electro-optic probing of potential and electric field distributions in MMICs have successfully been, used for a function and failure test as well as for a quantitative circuit-internal characterization.1,2 To demonstrate the capabilities of the measurement technique especially for a device-internal analysis, in this paper the 2-D electro-optic field mapping is applied to study coplanar MMIC components with structure sizes in the μm and sub-μm range.
© 1996 Optical Society of America
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