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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1996),
  • paper CThQ1

Out-of-plane refractive microlens for free-space integrated optics

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Abstract

Free-space micro-optical systems integrated on a single chip have many applications in optical data storage, sensing, communication networks, display, and packaging of optoelectronic devices. Previously, we have demonstrated a surface-micromachined “free-space micro-optical bench,” which can monolithically integrate free-space micro-optical elements with active optoelectronic elements.1

© 1996 Optical Society of America

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