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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1996),
  • paper CWP3

3-D low-coherence imaging for multiple-layer industrial surface analysis

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Abstract

A system based on low-coherence interferometry is presented, which enables absolute distance measurement of several reflecting layers along a beam path to be performed. Transverse information is obtained by using a 2-D imaging array, rather than a beam scanning device.

© 1996 Optical Society of America

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