Abstract
Circuit features were imaged with high resolution by raster scanning using femtosecond pulses at 1.5 μm focused through the polished circuit rear face. Applications in IC failure analysis are envisioned.
© 1997 Optical Society of America
PDF ArticleMore Like This
K. A. Serrels, E. Ramsay, and D. T. Reid
IThL6 International Quantum Electronics Conference (IQEC) 2009
E. Ramsay, N. Pleynet, D. Xiao, R. J. Warburton, and D. T. Reid
CTuB6 Conference on Lasers and Electro-Optics (CLEO:S&I) 2005
H. K. Heinrich, N. Pakdaman, D. C. Edelstein, I. L. Prince, and K. Stevens
CThG5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1992