Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO2 laser

Hiroyuki Yabe; Akihisa Takahashi; Minoru Obara

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1997),
paper CTuK5

Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO₂ laser

Hiroyuki Yabe, Akihisa Takahashi, and Minoru Obara

Conference on Lasers and Electro-Optics 1997

Baltimore, Maryland United States
18–23 May 1997
ISBN: 1-55752-498-8

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Nanoscale Material Processing (CTuK)

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H. Yabe, A. Takahashi, and M. Obara, "Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO2 laser," in Conference on Lasers and Electro-Optics, D. Killinger, G. Valley, C. Chang-Hasnain, and W. Knox, eds., Vol. 11 of OSA Technical Digest (Optica Publishing Group, 1997), paper CTuK5.

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Abstract

Recently aluminum nitride (AIN) ceramics has attracted much attention as a substrate material for high-power optoelectronic devices due to its excellent properties such as high thermal conductivity and high electrical resistance.

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