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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CTuK7

Deep UV laser-assisted cryo-etching of GaN

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Abstract

Etching of GaN materials has attracted great attention because of the need in fabricating blue-green light-emitting diodes, laser diodes and possibly other optoelectronic devices.

© 1997 Optical Society of America

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