Laser-generated nonlinear surface acoustic waves and applications for surface cleaning

Hans Schuessler

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1997),
paper CTuX5

Laser-generated nonlinear surface acoustic waves and applications for surface cleaning

Hans Schuessler

Conference on Lasers and Electro-Optics 1997

Baltimore, Maryland United States
18–23 May 1997
ISBN: 1-55752-498-8

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Laser Surface Processing and Micro-Fabrication (CTuX)

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H. Schuessler, "Laser-generated nonlinear surface acoustic waves and applications for surface cleaning," in Conference on Lasers and Electro-Optics, D. Killinger, G. Valley, C. Chang-Hasnain, and W. Knox, eds., Vol. 11 of OSA Technical Digest (Optica Publishing Group, 1997), paper CTuX5.

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Abstract

There are several fields in modern semiconductor and integrated circuit technology for which the development of semiconductor processing free of fine particles becomes increasingly important.

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