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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CWF56

Near-planar monolithic integration of GaAs FETs and LEDs with use of a thermal oxide isolation (TOI) layer

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Abstract

Monolithic integration of GaAs FETs and vertical-cavity surface-emitting lasers (VCSELs)/ photodetectors on the same chip is difficult in part because the current flow through a FFT is in the plane of the wafer but must be directed perpendicularly through a vertical p-n junction device.

© 1997 Optical Society of America

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