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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CFD1

Laser chemical processing for three-dimensional microstructures

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Abstract

Removal of material or deposition—both with spatial control—can be induced by interaction of laser light with surfaces that are in contact with a suitable chemical environment.

© 1998 Optical Society of America

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