Submicron lines in thin metal films micromachined by an ultrafast laser oscillator

X. Liu

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper CFD5

Submicron lines in thin metal films micromachined by an ultrafast laser oscillator

X. Liu

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

From the session
Femtosecond Microstructuring (CFD)

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X. Liu, "Submicron lines in thin metal films micromachined by an ultrafast laser oscillator," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper CFD5.

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Abstract

Ultrashort laser pulses have been shown to hold great potential for high-precision micro-machining applications.

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