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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CThAA3

Silica-based planar optical waveguide devices by TEOS/O3 APCVD method

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The technology of silica optical waveguides on Si substrate is attractive not only for passive planar lightwave circuits (PLCs) but also for hybrid integration of functional devices for optical cont munications and interconnections.

© 1998 Optical Society of America

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