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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CThO55

Bragg gratings in hollow-cathode PECVD germanosilica planar waveguides

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Plasma-enhanced chemical vapor deposition (PECVD) has shown promise since the late 1980s1 as a technique for growing germano-silica waveguide layers for use in photonic integrated circuits.

© 1998 Optical Society of America

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