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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper CTuQ2

Studies on dependence of wet oxidation kinetics of AIAs layer in vertical-cavity surface-emitting laser structures on different physical parameters

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Abstract

For the last few years, selective wet oxidation of AlGaAs1 has been successfully employed in the fabrication of various highly efficient, low-threshold-current vertical-cavity surface-emitting laser (VCSEL) structures.

© 1998 Optical Society of America

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